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Technical Library
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Dielectric constant measurement of FOx® flowable oxide (249 KB)
Technical Paper Dielectric Constant Measurement of FOx® Flowable Oxide
DNS materials of construction compatability with NRD and MIBK (58 KB)
Technical Paper DNS Materials of Construction Compatibility with NRD and MIBK
FTIR analysis of FOx® flowable oxide thin film (80 KB)
Technical Paper FTIR Analysis of FOx® Flowable Oxide Thin Film
Processing FOx® flowable oxide on Dainippon screen spincoaters (44 KB)
Technical Paper Processing FOx® Flowable Oxide
Semix PVC formulation compatability with NRD (56 KB)
Technical Paper Semix PVC Formulation Compatibility with NRD
Setting up edge bead removal on a spincoater (67 KB)
Technical Paper Setting up Edge Bead Removal on a Spincoater
Spin-on Inter-Metal Dielectric Materials (220 KB)
Technical Paper
Spincoater modifications for FOx® flowable oxide processing (40 KB)
Technical Paper Spincoater Modifications for FOx® Flowable Oxide Processing
Spincoater startup for FOx® flowable oxide service (40 KB)
Technical Paper Spincoater Startup for FOx® Flowable Oxide Service
Spincoater waste handling guide (38 KB)
Technical Paper Spincoater Waste Handling Tips
Supplemental preventative maintenance schedule for Dainippon screen spincoater (39 KB)
Technical Paper Supplemental Preventative Maintenance Schedule for Dainippon Screen Spincoaters
Supplemental preventative maintenance schedule for Semix spincoaters (39 KB)
Technical Paper Supplemental Preventative Maintenance Schedule for Semix Spincoaters
Troubleshooting equipment performance and film quality issues (48 KB)
Technical Paper Troubleshooting Equipment Performance and Film Quality Issues
Troubleshooting guide for FOx® flowable oxide (47 KB)
Technical Paper Troubleshooting Guide for FOx® Flowable Oxide
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14 Results
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