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FOx® Flowable Oxide is a flowable, inorganic polymer designed to meet industry demands for improved dielectric materials. FOx® Flowable Oxide is a direct replacement for low temperature CVD and SOG processes. It is supplied as a liquid solution of hydrogen silsesquioxane in a carrier solvent. It is applied as a spun-on, flowable polymer and cured to a microporous amorphous film.
FOx® Flowable Oxides offer:
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State-of-the-art planarization
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Low dielectric constant
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Controlled film thickness
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Excellent gap fill
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Very low defect density
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Choice of carrier solvent systems
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