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| ZHCDS CVD Precursor | | A silicon source specialty liquid engineered for LPCVD, APCVD
and ALD processes used to deposit thin-film dielectrics | | Compatible with standard LPCVD equipment and standard liquid
delivery systems, nonpyrophoric | |
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| Chlorosilanes | | Silicon source specialty materials engineered for LPCVD, APCVD
and ALD processes used to deposit thin-film dielectrics | | Compatible with standard thermal deposition equipment and
standard liquid delivery systems, nonpyrophoric | |
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