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Silane
One of the main concerns in using Silane gas, SiH4, is safety. It is an
unstable, pyrophoric material and burns or explodes in contact with ambient
air. This means that many extra precautions must be taken for processing and
equipment, such as double-wall vessels. Additionally, silane is a toxic
material.
TEOS
Silicon dioxide films grown from TEOS often have higher dielectric constant
(ΔΈ) values than desired at 3.6 to 4.0. Films also have uneven growth rates over
features, and the higher growth on the corners of steps can result in voids or
keyholes between conducting lines for some gap widths. Also, the liquid
delivery systems for this material can be difficult.
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