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Dow Corning® brand antireflective resin solutions are for
use as the silicon resin raw material for advanced 193 nm antireflective
coating formulations. We are custom designing, developing and commercializing
them to meet the unique needs of leading antireflective coating material
suppliers.
Performance Properties:
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Etch resistant
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30 - 40 or > 40 wt% silicon
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Solution stability
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Low temperature cure
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Compatibility with photoresist
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Reworkability
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Controlled optical properties
Physical Form: Liquid solution of silicon resin in carrier
solvent
Typical Resins: Customized silsesquioxane resins
Application Use: Silicon resin raw material for 193 nm antireflective
coating formulations
Need a customized silicon resin for your advanced antireflection
formulation? Contact us to
learn how we can help you develop next generation technology, today.

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