FOx® Flowable Oxide is a flowable, inorganic polymer that is designed
to meet industry demands for improved dielectric materials. FOx Flowable
Oxide is s direct replacement for low temperature CVD and SOG processes.
It is ideal for use as an interlevel dielectric in multilevel metal integrated
circuit designs.
As Supplied - it is a liquid solution of hydrogen silsesquioxane in
carier solvent
As Processed - it is a spun-on flowable polymer cured to a
microporous amorphous film
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