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Silicones from Dow Corning
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IMAGINE: Good planarizing, low-k organic free silicon-based spin-on dielectrics

Low stress silicon-based dielectricsDow Corning was an early innovator in spin-on dielectrics technology, semiconductor fabricators worldwide.

Our industry-leading materials are used widely as inter-level dielectrics in multilevel metal IC integrated circuit designs. They may also markedly improve topside planarity when applied prior to final passivation. Unlike organic materials, our flowable dielectric polymers contains only Si, O, and H, making integration, in many cases, much easier. Plus, they offer a lower dielectric constant and excellent high aspect gap fill, which becomes increasingly important as feature dimensions shrink. Additionally, the material can also provide corrosion resistance in some non- electronic applications.

Available in a choice of carrier solvent systems, spin-on dielectric materials from Dow Corning also enable controlled film thickness, and deliver excellent gap fill and very low defect density.

As a leading supplier of silicones for more than seven decades, Dow Corning brings you an established record for delivering targeted properties consistently, with batch-to-batch reproducibility and backed by certified data and 24/7 global technical support. Count on us for a host of analytical and technical services ranging from material qualification and testing through manufacturing start-up. Our extensive knowledge of materials and processes can often translate into manufacturing and process efficiencies for you.

More than a world-class materials supplier, Dow Corning is an expert and dedicated collaborator. If our product finder cannot identify an off-the-shelf solution that meets your precise specifications, or if you are looking for application expertise and support please contact us.

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Flowable Oxides
Flowable, inorganic dielectric polymers
FOx® 15 Flowable Oxide
FOx® 16 Flowable Oxide
FOx® 24 Flowable Oxide
FOx® 25 Flowable Oxide
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